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    Rubrik: Sonderthema

    Verfahren und Durchführung der Kontrolle von Reinräumen / Selbstzweck und Dokumentationspflicht

    Verfahren und Durchführung der Kontrolle von Reinräumen

    Selbstzweck und Dokumentationspflicht

    Thomas von Kahlden

    CCI -von Kahlden GmbH (Contamination Control Instruments), Stuttgart

    Procedure and Execution for Controlling Clean Rooms as an End to Itself and for Documentation Purposes

    Several new technical developments focus on small structures and small components nowadays. Essential areas are micromechanics and microelectronics. Other industrial and research fields such as genetic and bioprocess engineering also require the use of clean rooms. Clean rooms are erected in various size dimensions -independent on their area of use. The spectrum ranges from the so-called LF box to the large-scale room with several thousand square meters as is required in the semiconductor manufacturing process. What all clean room facilities have in common is that, after going into operation, acceptance tests are required to verify the specified quality. Taking up production requires - either continuously or in intervals - the monitoring of the parameters that define a clean room. The following essay considers the parameters of clean rooms, the measuring procedures in terms of acceptance testing and monitoring, as well as the necessary procedures and techniques for such. The VDI standard 2083, sheet 3, is the essential guideline for the way in which the required acceptance measurements are executed. Also discussed are the relevant points for setting up a monitoring schedule for the clean room and for the manufacturing process. Furthermore, inputs are given in terms of how it is possible to execute monitoring measurements - as required for example in pharmacy - and at the same time perform measurements for optimizing the manufacturing process.

    Key words Dokumentationspflicht · Reinräume


    © ECV- Editio Cantor Verlag (Germany) 1999